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Structural and electrical properties of thin SrHfON films for high-k gate dielectric.

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Bibliographic Details
Title: Structural and electrical properties of thin SrHfON films for high-k gate dielectric.
Authors: Feng, Li-ping, Liu, Zheng-tang
Source: Applied Physics Letters; June 22 2009, Vol. 94 Issue 25, p252907-252907, 1p
Database: Applied Science & Technology Source
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