The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si.
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| Title: | The formation, migration, agglomeration and annealing of vacancy-type defects in self-implanted Si. |
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| Authors: | Coleman, P. G., Harding, R. E., Davies, G. |
| Source: | Journal of Materials Science: Materials in Electronics; July 2007, Vol. 18 Issue 7, p695-700, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09574522 |
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| DOI: | 10.1007/s10854-006-9080-9 |
