Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas.
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| Title: | Study of radial growth rate and size control of silicon nanocrystals in square-wave-modulated silane plasmas. |
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| Authors: | Nguyen-Tran, Th, Roca i Cabarrocas, P., Patriarche, G. |
| Source: | Applied Physics Letters; September 10 2007, Vol. 91 Issue 11, p111501-111501, 1p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.2784294 |
