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Ultrathin n+/p junction in preamorphized silicon by phosphorus and carbon coimplantation engineering: Influence of C location.

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Bibliographic Details
Title: Ultrathin n+/p junction in preamorphized silicon by phosphorus and carbon coimplantation engineering: Influence of C location.
Authors: Cagnat, N., Mathiot, D., Laviron, C.
Source: Journal of Applied Physics; November 15 2007, Vol. 102 Issue 10, p106102-106102, 1p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501512084
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Ultrathin n+/p junction in preamorphized silicon by phosphorus and carbon coimplantation engineering: Influence of C location.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Cagnat%2C+N%2E%22">Cagnat, N.</searchLink><br /><searchLink fieldCode="AU" term="%22Mathiot%2C+D%2E%22">Mathiot, D.</searchLink><br /><searchLink fieldCode="AU" term="%22Laviron%2C+C%2E%22">Laviron, C.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; November 15 2007, Vol. 102 Issue 10, p106102-106102, 1p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501512084
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.2811726
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 1
        StartPage: 106102
    Titles:
      – TitleFull: Ultrathin n+/p junction in preamorphized silicon by phosphorus and carbon coimplantation engineering: Influence of C location.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Cagnat, N.
      – PersonEntity:
          Name:
            NameFull: Mathiot, D.
      – PersonEntity:
          Name:
            NameFull: Laviron, C.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 11
              Text: November 15 2007
              Type: published
              Y: 2007
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 102
            – Type: issue
              Value: 10
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1