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Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine.

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Title: Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine.
Authors: Burton, B. B., Lavoie, A. R., George, S. M.
Source: Journal of the Electrochemical Society; Jul2008, Vol. 155 Issue 7, pD508-D516, 9p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501542185
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine.
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  Data: <searchLink fieldCode="AU" term="%22Burton%2C+B%2E+B%2E%22">Burton, B. B.</searchLink><br /><searchLink fieldCode="AU" term="%22Lavoie%2C+A%2E+R%2E%22">Lavoie, A. R.</searchLink><br /><searchLink fieldCode="AU" term="%22George%2C+S%2E+M%2E%22">George, S. M.</searchLink>
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+the+Electrochemical+Society%22">Journal of the Electrochemical Society</searchLink>; Jul2008, Vol. 155 Issue 7, pD508-D516, 9p
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    Identifiers:
      – Type: doi
        Value: 10.1149/1.2908741
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      – Code: eng
        Text: English
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        PageCount: 9
        StartPage: D508
    Titles:
      – TitleFull: Tantalum Nitride Atomic Layer Deposition Using (tert-Butylimido)tris(diethylamido)tantalum and Hydrazine.
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            NameFull: Burton, B. B.
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            NameFull: Lavoie, A. R.
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            NameFull: George, S. M.
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            – D: 01
              M: 07
              Text: Jul2008
              Type: published
              Y: 2008
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              Value: 155
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              Value: 7
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            – TitleFull: Journal of the Electrochemical Society
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