Role of negatively charged defects in the lattice contraction of Al—Si—N.

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Title: Role of negatively charged defects in the lattice contraction of Al—Si—N.
Authors: Pignedoli, C. A., Passerone, D., Hug, H. J.
Source: Applied Physics Letters; February 15 2010, Vol. 96 Issue 7, p071908-1-071908-3, 3p
Database: Applied Science & Technology Source
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        Value: 10.1063/1.3323093
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        Text: English
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      – TitleFull: Role of negatively charged defects in the lattice contraction of Al—Si—N.
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              Text: February 15 2010
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