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A laser-generated plasma source for x-ray lithography and VLSI.

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Bibliographic Details
Title: A laser-generated plasma source for x-ray lithography and VLSI.
Authors: Michette, A. G., Rogoyski, A. M., Burge, R. E.
Source: Journal of Physics. E, Scientific Instruments.; October 1988, Vol. 21, p959-965, 7p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501589925
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: A laser-generated plasma source for x-ray lithography and VLSI.
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  Data: <searchLink fieldCode="AU" term="%22Michette%2C+A%2E+G%2E%22">Michette, A. G.</searchLink><br /><searchLink fieldCode="AU" term="%22Rogoyski%2C+A%2E+M%2E%22">Rogoyski, A. M.</searchLink><br /><searchLink fieldCode="AU" term="%22Burge%2C+R%2E+E%2E%22">Burge, R. E.</searchLink>
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501589925
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1088/0022-3735/21/10/011
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      – Code: eng
        Text: English
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      Pagination:
        PageCount: 7
        StartPage: 959
    Titles:
      – TitleFull: A laser-generated plasma source for x-ray lithography and VLSI.
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            NameFull: Michette, A. G.
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            NameFull: Rogoyski, A. M.
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            NameFull: Burge, R. E.
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            – D: 05
              M: 10
              Text: October 1988
              Type: published
              Y: 1988
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              Value: 21
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            – TitleFull: Journal of Physics. E, Scientific Instruments.
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