Can Semiconductor IC Equipment Survive without Thermal Spray Coatings?
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| Title: | Can Semiconductor IC Equipment Survive without Thermal Spray Coatings? |
|---|---|
| Authors: | Shih, Hong |
| Source: | Advanced Materials & Processes; May 2010, Vol. 168 Issue 5, p42-42, 1p |
| Database: | Applied Science & Technology Source |
| FullText | Links: – Type: pdflink Text: Availability: 0 |
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| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501601302 |
| RecordInfo | BibRecord: BibEntity: Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 1 StartPage: 42 Titles: – TitleFull: Can Semiconductor IC Equipment Survive without Thermal Spray Coatings? Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Shih, Hong IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 05 Text: May 2010 Type: published Y: 2010 Identifiers: – Type: issn-print Value: 08827958 Numbering: – Type: volume Value: 168 – Type: issue Value: 5 Titles: – TitleFull: Advanced Materials & Processes Type: main |
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