View in EDS

Atomic-scale redistribution of dopants in polycrystalline silicon layers.

Saved in:
Bibliographic Details
Title: Atomic-scale redistribution of dopants in polycrystalline silicon layers.
Authors: Duguay, S., Colin, A., Mathiot, D.
Source: Journal of Applied Physics; Aug2010, Vol. 107 Issue 8, p034911-1-034911-7, 7p
Database: Applied Science & Technology Source
Be the first to leave a comment!
You must be logged in first