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Effect of Au contamination on the electrical characteristics of a “model” small-angle grain boundary in n-type direct silicon bonded wafer.

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Bibliographic Details
Title: Effect of Au contamination on the electrical characteristics of a “model” small-angle grain boundary in n-type direct silicon bonded wafer.
Authors: Yu, X., Li, X., Fan, R.
Source: Journal of Applied Physics; Oct2010, Vol. 108 Issue 4, p053719-1-053719-6, 6p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501664953
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Effect of Au contamination on the electrical characteristics of a “model” small-angle grain boundary in n-type direct silicon bonded wafer.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Yu%2C+X%2E%22">Yu, X.</searchLink><br /><searchLink fieldCode="AU" term="%22Li%2C+X%2E%22">Li, X.</searchLink><br /><searchLink fieldCode="AU" term="%22Fan%2C+R%2E%22">Fan, R.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; Oct2010, Vol. 108 Issue 4, p053719-1-053719-6, 6p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501664953
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.3471817
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 6
        StartPage: 053719-1
    Titles:
      – TitleFull: Effect of Au contamination on the electrical characteristics of a “model” small-angle grain boundary in n-type direct silicon bonded wafer.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Yu, X.
      – PersonEntity:
          Name:
            NameFull: Li, X.
      – PersonEntity:
          Name:
            NameFull: Fan, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 15
              M: 10
              Text: Oct2010
              Type: published
              Y: 2010
          Identifiers:
            – Type: issn-print
              Value: 00218979
          Numbering:
            – Type: volume
              Value: 108
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Journal of Applied Physics
              Type: main
ResultId 1