Angular distribution of atoms emitted from a SrZrO3 target by laser ablation under different laser fluences and oxygen pressures.

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Bibliographic Details
Title: Angular distribution of atoms emitted from a SrZrO3 target by laser ablation under different laser fluences and oxygen pressures.
Authors: Konomi, I.1,2, konomi@mosk.tytlabs.co.jp, Motohiro, T.1, Azuma, H.2, Asaoka, T.2, Nakazato, T.3, Sato, E.3, Shimizu, T.3, Fujioka, S.3, Sarukura, N.3, Nishimura, H.3
Source: Journal of Vacuum Science & Technology: Part A-Vacuums, Surfaces & Films; May2010, Vol. 28 Issue 3, p400-406, 7p, 3 Diagrams, 1 Chart, 6 Graphs
Database: Applied Science & Technology Source
Description
ISSN:07342101
DOI:10.1116/1.3360905