High-concentration boron diffusion in silicon: simulation of the precipitation phenomena.
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| Title: | High-concentration boron diffusion in silicon: simulation of the precipitation phenomena. |
|---|---|
| Authors: | Solmi, S., Landi, E., Baruffaldi, F. |
| Source: | Journal of Applied Physics; October 1 1990, Vol. 68, p3250-3258, 9p |
| Database: | Applied Science & Technology Source |
| FullText | Text: Availability: 0 |
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| Header | DbId: aci DbLabel: Applied Science & Technology Source An: 501794122 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| Items | – Name: Title Label: Title Group: Ti Data: High-concentration boron diffusion in silicon: simulation of the precipitation phenomena. – Name: Author Label: Authors Group: Au Data: <searchLink fieldCode="AU" term="%22Solmi%2C+S%2E%22">Solmi, S.</searchLink><br /><searchLink fieldCode="AU" term="%22Landi%2C+E%2E%22">Landi, E.</searchLink><br /><searchLink fieldCode="AU" term="%22Baruffaldi%2C+F%2E%22">Baruffaldi, F.</searchLink> – Name: TitleSource Label: Source Group: Src Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; October 1 1990, Vol. 68, p3250-3258, 9p |
| PLink | https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501794122 |
| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1063/1.346376 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 9 StartPage: 3250 Titles: – TitleFull: High-concentration boron diffusion in silicon: simulation of the precipitation phenomena. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Solmi, S. – PersonEntity: Name: NameFull: Landi, E. – PersonEntity: Name: NameFull: Baruffaldi, F. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: October 1 1990 Type: published Y: 1990 Identifiers: – Type: issn-print Value: 00218979 Numbering: – Type: volume Value: 68 Titles: – TitleFull: Journal of Applied Physics Type: main |
| ResultId | 1 |