Electrical characterization of silicon epitaxial layers grown by limited reaction processing.
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| Title: | Electrical characterization of silicon epitaxial layers grown by limited reaction processing. |
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| Authors: | Mathiot, D., Regolini, J. L., Dutartre, D. |
| Source: | Journal of Applied Physics; January 1 1991, Vol. 69, p358-361, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.347721 |
