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Electrical characterization of silicon epitaxial layers grown by limited reaction processing.

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Bibliographic Details
Title: Electrical characterization of silicon epitaxial layers grown by limited reaction processing.
Authors: Mathiot, D., Regolini, J. L., Dutartre, D.
Source: Journal of Applied Physics; January 1 1991, Vol. 69, p358-361, 4p
Database: Applied Science & Technology Source
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