APA (7th ed.) Citation

Spencer, A. G., Bishop, C. A., & Howson, R. P. (1987). The design and performance of planar magnetron sputtering cathodes. Vacuum, 37(3-4), 363. https://doi.org/10.1016/0042-207X(87)90026-1

Chicago Style (17th ed.) Citation

Spencer, A. G., C. A. Bishop, and R. P. Howson. "The Design and Performance of Planar Magnetron Sputtering Cathodes." Vacuum 37, no. 3-4 (1987): 363. https://doi.org/10.1016/0042-207X(87)90026-1.

MLA (9th ed.) Citation

Spencer, A. G., et al. "The Design and Performance of Planar Magnetron Sputtering Cathodes." Vacuum, vol. 37, no. 3-4, 1987, p. 363, https://doi.org/10.1016/0042-207X(87)90026-1.