The design and performance of planar magnetron sputtering cathodes.
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| Title: | The design and performance of planar magnetron sputtering cathodes. |
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| Authors: | Spencer, A. G., Bishop, C. A., Howson, R. P. |
| Source: | Vacuum; 1987, Vol. 37 Issue 3-4, p363-366, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0042207X |
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| DOI: | 10.1016/0042-207X(87)90026-1 |
