View in EDS

The design and performance of planar magnetron sputtering cathodes.

Saved in:
Bibliographic Details
Title: The design and performance of planar magnetron sputtering cathodes.
Authors: Spencer, A. G., Bishop, C. A., Howson, R. P.
Source: Vacuum; 1987, Vol. 37 Issue 3-4, p363-366, 4p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501836997
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: The design and performance of planar magnetron sputtering cathodes.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Spencer%2C+A%2E+G%2E%22">Spencer, A. G.</searchLink><br /><searchLink fieldCode="AU" term="%22Bishop%2C+C%2E+A%2E%22">Bishop, C. A.</searchLink><br /><searchLink fieldCode="AU" term="%22Howson%2C+R%2E+P%2E%22">Howson, R. P.</searchLink>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Vacuum%22">Vacuum</searchLink>; 1987, Vol. 37 Issue 3-4, p363-366, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501836997
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1016/0042-207X(87)90026-1
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 363
    Titles:
      – TitleFull: The design and performance of planar magnetron sputtering cathodes.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Spencer, A. G.
      – PersonEntity:
          Name:
            NameFull: Bishop, C. A.
      – PersonEntity:
          Name:
            NameFull: Howson, R. P.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 04
              M: 01
              Text: 1987
              Type: published
              Y: 1987
          Identifiers:
            – Type: issn-print
              Value: 0042207X
          Numbering:
            – Type: volume
              Value: 37
            – Type: issue
              Value: 3-4
          Titles:
            – TitleFull: Vacuum
              Type: main
ResultId 1