APA (7th ed.) Citation

Mathiot, D., & Barbier, D. (1991). Solubility enhancement of metallic impurities in silicon by rapid thermal annealing. Journal of Applied Physics, 69, 3878. https://doi.org/10.1063/1.348444

Chicago Style (17th ed.) Citation

Mathiot, Daniel, and Daniel Barbier. "Solubility Enhancement of Metallic Impurities in Silicon by Rapid Thermal Annealing." Journal of Applied Physics 69 (1991): 3878. https://doi.org/10.1063/1.348444.

MLA (9th ed.) Citation

Mathiot, Daniel, and Daniel Barbier. "Solubility Enhancement of Metallic Impurities in Silicon by Rapid Thermal Annealing." Journal of Applied Physics, vol. 69, 1991, p. 3878, https://doi.org/10.1063/1.348444.