Solubility enhancement of metallic impurities in silicon by rapid thermal annealing.
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| Title: | Solubility enhancement of metallic impurities in silicon by rapid thermal annealing. |
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| Authors: | Mathiot, Daniel, Barbier, Daniel |
| Source: | Journal of Applied Physics; April 1 1991, Vol. 69, p3878-3881, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.348444 |
