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Experimental investigation and simulation of Sb diffusion in Si.

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Bibliographic Details
Title: Experimental investigation and simulation of Sb diffusion in Si.
Authors: Solmi, S., Baruffaldi, F., Derdour, M.
Source: Journal of Applied Physics; January 15 1992, Vol. 71, p697-703, 7p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 501971197
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Experimental investigation and simulation of Sb diffusion in Si.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; January 15 1992, Vol. 71, p697-703, 7p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=501971197
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      – Type: doi
        Value: 10.1063/1.351329
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      – Code: eng
        Text: English
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        PageCount: 7
        StartPage: 697
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      – TitleFull: Experimental investigation and simulation of Sb diffusion in Si.
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            NameFull: Solmi, S.
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            NameFull: Baruffaldi, F.
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            NameFull: Derdour, M.
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            – D: 15
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              Text: January 15 1992
              Type: published
              Y: 1992
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              Value: 71
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