Experimental investigation and simulation of Sb diffusion in Si.
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| Title: | Experimental investigation and simulation of Sb diffusion in Si. |
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| Authors: | Solmi, S., Baruffaldi, F., Derdour, M. |
| Source: | Journal of Applied Physics; January 15 1992, Vol. 71, p697-703, 7p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.351329 |
