APA (7th ed.) Citation

Larson, L. A. (1988). An industry-wide evaluation of ion implant dosing accuracy. Journal of the Electrochemical Society, 135, 1802. https://doi.org/10.1149/1.2096134

Chicago Style (17th ed.) Citation

Larson, L. A. "An Industry-wide Evaluation of Ion Implant Dosing Accuracy." Journal of the Electrochemical Society 135 (1988): 1802. https://doi.org/10.1149/1.2096134.

MLA (9th ed.) Citation

Larson, L. A. "An Industry-wide Evaluation of Ion Implant Dosing Accuracy." Journal of the Electrochemical Society, vol. 135, 1988, p. 1802, https://doi.org/10.1149/1.2096134.