An industry-wide evaluation of ion implant dosing accuracy.
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| Title: | An industry-wide evaluation of ion implant dosing accuracy. |
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| Authors: | Larson, L. A. |
| Source: | Journal of the Electrochemical Society; July 1988, Vol. 135, p1802-1805, 4p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00134651 |
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| DOI: | 10.1149/1.2096134 |
