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An industry-wide evaluation of ion implant dosing accuracy.

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Bibliographic Details
Title: An industry-wide evaluation of ion implant dosing accuracy.
Authors: Larson, L. A.
Source: Journal of the Electrochemical Society; July 1988, Vol. 135, p1802-1805, 4p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 502007509
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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        Value: 10.1149/1.2096134
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      – Code: eng
        Text: English
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        PageCount: 4
        StartPage: 1802
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      – TitleFull: An industry-wide evaluation of ion implant dosing accuracy.
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            NameFull: Larson, L. A.
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          Dates:
            – D: 01
              M: 07
              Text: July 1988
              Type: published
              Y: 1988
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              Value: 135
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            – TitleFull: Journal of the Electrochemical Society
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