APA (7th ed.) Citation

Hymes, S., Murarka, S. P., & Shepard, C. (1992). Passivation of copper by silicide formation in dilute silane. Journal of Applied Physics, 71, 4623. https://doi.org/10.1063/1.350765

Chicago Style (17th ed.) Citation

Hymes, S., S. P. Murarka, and C. Shepard. "Passivation of Copper by Silicide Formation in Dilute Silane." Journal of Applied Physics 71 (1992): 4623. https://doi.org/10.1063/1.350765.

MLA (9th ed.) Citation

Hymes, S., et al. "Passivation of Copper by Silicide Formation in Dilute Silane." Journal of Applied Physics, vol. 71, 1992, p. 4623, https://doi.org/10.1063/1.350765.