Passivation of copper by silicide formation in dilute silane.
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| Title: | Passivation of copper by silicide formation in dilute silane. |
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| Authors: | Hymes, S., Murarka, S. P., Shepard, C. |
| Source: | Journal of Applied Physics; May 1 1992, Vol. 71, p4623-4625, 3p |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.350765 |
