APA (7th ed.) Citation

Mathiot, D., & Pfister, J. C. (1982). Influence of the nonequilibrium vacancies on the diffusion of phosphorus into silicon. Journal of Applied Physics, 53, 3053. https://doi.org/10.1063/1.331049

Chicago Style (17th ed.) Citation

Mathiot, D., and J. C. Pfister. "Influence of the Nonequilibrium Vacancies on the Diffusion of Phosphorus into Silicon." Journal of Applied Physics 53 (1982): 3053. https://doi.org/10.1063/1.331049.

MLA (9th ed.) Citation

Mathiot, D., and J. C. Pfister. "Influence of the Nonequilibrium Vacancies on the Diffusion of Phosphorus into Silicon." Journal of Applied Physics, vol. 53, 1982, p. 3053, https://doi.org/10.1063/1.331049.