Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands.

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Bibliographic Details
Title: Nanogrids and Beehive-Like Nanostructures Formed by Plasma Etching the Self-Organized SiGe Islands.
Authors: Chang, Yuan-Ming1, Jian, Sheng-Rui1, srjian@gmail.com, Juang, Jenh-Yih2
Source: Nanoscale Research Letters; Sep2010, Vol. 5 Issue 9, p1456-1463, 8p, 1 Color Photograph, 5 Black and White Photographs, 2 Graphs
Database: Applied Science & Technology Source
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