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Charge retention phenomena in CT silicon nitride: Impact of technology and operating conditions.

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Title: Charge retention phenomena in CT silicon nitride: Impact of technology and operating conditions.
Authors: Ghidini, G.1, Galbiati, N.1, Mascellino, E.2, Scozzari, C.1, Sebastiani, A.1, Amoroso, S.2, Compagnoni, C. Monzio2, Spinelli, A. S.2, Maconi, A.2, Piagge, R.1, Del Vitto, A.1, Alessandri, M.1, Baldi, I.1, Moltrasio, E.1, Albini, G.1, Grossi, A.1, Tessariol, P.1, Camerlenghi, E.1, Mauri, A.1
Source: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics; Jan2011, Vol. 29 Issue 1, p01AE01, 4p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 57656890
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Charge retention phenomena in CT silicon nitride: Impact of technology and operating conditions.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Ghidini%2C+G%2E%22">Ghidini, G.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Galbiati%2C+N%2E%22">Galbiati, N.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Mascellino%2C+E%2E%22">Mascellino, E.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Scozzari%2C+C%2E%22">Scozzari, C.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Sebastiani%2C+A%2E%22">Sebastiani, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Amoroso%2C+S%2E%22">Amoroso, S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Compagnoni%2C+C%2E+Monzio%22">Compagnoni, C. Monzio</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Spinelli%2C+A%2E+S%2E%22">Spinelli, A. S.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Maconi%2C+A%2E%22">Maconi, A.</searchLink><relatesTo>2</relatesTo><br /><searchLink fieldCode="AU" term="%22Piagge%2C+R%2E%22">Piagge, R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Del+Vitto%2C+A%2E%22">Del Vitto, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Alessandri%2C+M%2E%22">Alessandri, M.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Baldi%2C+I%2E%22">Baldi, I.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Moltrasio%2C+E%2E%22">Moltrasio, E.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Albini%2C+G%2E%22">Albini, G.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Grossi%2C+A%2E%22">Grossi, A.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Tessariol%2C+P%2E%22">Tessariol, P.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Camerlenghi%2C+E%2E%22">Camerlenghi, E.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Mauri%2C+A%2E%22">Mauri, A.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Nanotechnology+%26+Microelectronics%22">Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics</searchLink>; Jan2011, Vol. 29 Issue 1, p01AE01, 4p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=57656890
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.3532541
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 4
        StartPage: 01AE01
    Titles:
      – TitleFull: Charge retention phenomena in CT silicon nitride: Impact of technology and operating conditions.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Ghidini, G.
      – PersonEntity:
          Name:
            NameFull: Galbiati, N.
      – PersonEntity:
          Name:
            NameFull: Mascellino, E.
      – PersonEntity:
          Name:
            NameFull: Scozzari, C.
      – PersonEntity:
          Name:
            NameFull: Sebastiani, A.
      – PersonEntity:
          Name:
            NameFull: Amoroso, S.
      – PersonEntity:
          Name:
            NameFull: Compagnoni, C. Monzio
      – PersonEntity:
          Name:
            NameFull: Spinelli, A. S.
      – PersonEntity:
          Name:
            NameFull: Maconi, A.
      – PersonEntity:
          Name:
            NameFull: Piagge, R.
      – PersonEntity:
          Name:
            NameFull: Del Vitto, A.
      – PersonEntity:
          Name:
            NameFull: Alessandri, M.
      – PersonEntity:
          Name:
            NameFull: Baldi, I.
      – PersonEntity:
          Name:
            NameFull: Moltrasio, E.
      – PersonEntity:
          Name:
            NameFull: Albini, G.
      – PersonEntity:
          Name:
            NameFull: Grossi, A.
      – PersonEntity:
          Name:
            NameFull: Tessariol, P.
      – PersonEntity:
          Name:
            NameFull: Camerlenghi, E.
      – PersonEntity:
          Name:
            NameFull: Mauri, A.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 01
              Text: Jan2011
              Type: published
              Y: 2011
          Identifiers:
            – Type: issn-print
              Value: 21662746
          Numbering:
            – Type: volume
              Value: 29
            – Type: issue
              Value: 1
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Nanotechnology & Microelectronics
              Type: main
ResultId 1