View in EDS

Low-temperature silicon epitaxy using low pressure chemical vapor deposition with and without plasma enhancement.

Saved in:
Bibliographic Details
Title: Low-temperature silicon epitaxy using low pressure chemical vapor deposition with and without plasma enhancement.
Authors: Donahue, T. J.1, Burger, W. R.1, Reif, R.1
Source: Applied Physics Letters; 1984, Vol. 44 Issue 3, p346-348, 3p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 71379973
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
IllustrationInfo
Items – Name: Title
  Label: Title
  Group: Ti
  Data: Low-temperature silicon epitaxy using low pressure chemical vapor deposition with and without plasma enhancement.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Donahue%2C+T%2E+J%2E%22">Donahue, T. J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Burger%2C+W%2E+R%2E%22">Burger, W. R.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Reif%2C+R%2E%22">Reif, R.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Applied+Physics+Letters%22">Applied Physics Letters</searchLink>; 1984, Vol. 44 Issue 3, p346-348, 3p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=71379973
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1063/1.94754
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 3
        StartPage: 346
    Titles:
      – TitleFull: Low-temperature silicon epitaxy using low pressure chemical vapor deposition with and without plasma enhancement.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Donahue, T. J.
      – PersonEntity:
          Name:
            NameFull: Burger, W. R.
      – PersonEntity:
          Name:
            NameFull: Reif, R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 02
              Text: 1984
              Type: published
              Y: 1984
          Identifiers:
            – Type: issn-print
              Value: 00036951
          Numbering:
            – Type: volume
              Value: 44
            – Type: issue
              Value: 3
          Titles:
            – TitleFull: Applied Physics Letters
              Type: main
ResultId 1