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Beryllium implantation doping of InGaAs.

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Bibliographic Details
Title: Beryllium implantation doping of InGaAs.
Authors: Tell, B.1, Leheny, R. F.1, Liao, A. S. H.1, Bridges, T. J.1, Burkhardt, E. G.1, Chang, T. Y.1, Beebe, E. D.1
Source: Applied Physics Letters; 1984, Vol. 44 Issue 4, p438-440, 3p
Database: Applied Science & Technology Source
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