Enhanced Hole Mobility and Low Tinv for pMOSFET by a Novel Epitaxial Si/Ge Superlattice Channel. - Fu, Chung-Hao; Chang-Liao, Kuei-Shu; Liu, Li-Jung; Hsieh, Hsiao-Chi; Lu, Chun-Chang; Li, Chen-Chien; Wang, Tien-Ko; Heh, Da-Wei (IEEE Electron Device Letters, 2012)