Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon.
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| Title: | Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon. |
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| Authors: | Narayan, J.1, Holland, O. W.1, Appleton, B. R.1 |
| Source: | Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 4, p871-887, 17p |
| Database: | Applied Science & Technology Source |
| ISSN: | 0734211X |
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| DOI: | 10.1116/1.582708 |
