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Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon.

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Bibliographic Details
Title: Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon.
Authors: Narayan, J.1, Holland, O. W.1, Appleton, B. R.1
Source: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena; 1983, Vol. 1 Issue 4, p871-887, 17p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 74324176
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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Items – Name: Title
  Label: Title
  Group: Ti
  Data: Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon.
– Name: Author
  Label: Authors
  Group: Au
  Data: <searchLink fieldCode="AU" term="%22Narayan%2C+J%2E%22">Narayan, J.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Holland%2C+O%2E+W%2E%22">Holland, O. W.</searchLink><relatesTo>1</relatesTo><br /><searchLink fieldCode="AU" term="%22Appleton%2C+B%2E+R%2E%22">Appleton, B. R.</searchLink><relatesTo>1</relatesTo>
– Name: TitleSource
  Label: Source
  Group: Src
  Data: <searchLink fieldCode="JN" term="%22Journal+of+Vacuum+Science+%26+Technology%3A+Part+B-Microelectronics+Processing+%26+Phenomena%22">Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena</searchLink>; 1983, Vol. 1 Issue 4, p871-887, 17p
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=74324176
RecordInfo BibRecord:
  BibEntity:
    Identifiers:
      – Type: doi
        Value: 10.1116/1.582708
    Languages:
      – Code: eng
        Text: English
    PhysicalDescription:
      Pagination:
        PageCount: 17
        StartPage: 871
    Titles:
      – TitleFull: Solid-phase-epitaxial growth and formation of metastable alloys in ion implanted silicon.
        Type: main
  BibRelationships:
    HasContributorRelationships:
      – PersonEntity:
          Name:
            NameFull: Narayan, J.
      – PersonEntity:
          Name:
            NameFull: Holland, O. W.
      – PersonEntity:
          Name:
            NameFull: Appleton, B. R.
    IsPartOfRelationships:
      – BibEntity:
          Dates:
            – D: 01
              M: 10
              Text: 1983
              Type: published
              Y: 1983
          Identifiers:
            – Type: issn-print
              Value: 0734211X
          Numbering:
            – Type: volume
              Value: 1
            – Type: issue
              Value: 4
          Titles:
            – TitleFull: Journal of Vacuum Science & Technology: Part B-Microelectronics Processing & Phenomena
              Type: main
ResultId 1