Łukasiewicz, M. I., Włojcik-Głodowska, A., Guziewicz, E., Wolska, A., Klepka, M. T., Dłużewski, P., . . . Godlewski, M. (2012). ZnO, ZnMnO and ZnCoO films grown by atomic layer deposition. Semiconductor Science & Technology, 27(7), 1. https://doi.org/10.1088/0268-1242/27/7/074009
Chicago Style (17th ed.) CitationŁukasiewicz, M. I., et al. "ZnO, ZnMnO and ZnCoO Films Grown by Atomic Layer Deposition." Semiconductor Science & Technology 27, no. 7 (2012): 1. https://doi.org/10.1088/0268-1242/27/7/074009.
MLA (9th ed.) CitationŁukasiewicz, M. I., et al. "ZnO, ZnMnO and ZnCoO Films Grown by Atomic Layer Deposition." Semiconductor Science & Technology, vol. 27, no. 7, 2012, p. 1, https://doi.org/10.1088/0268-1242/27/7/074009.
Warning: These citations may not always be 100% accurate.