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ZnO, ZnMnO and ZnCoO films grown by atomic layer deposition.

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Title: ZnO, ZnMnO and ZnCoO films grown by atomic layer deposition.
Authors: Łukasiewicz, M. I.1, Włojcik-Głodowska, A.1, Guziewicz, E.1, Wolska, A.1, Klepka, M. T.1, Dłużewski, P.1, Jakieła, R.1, Łusakowska, E.1, Kopalko, K.1, Paszkowicz, W.1, Wachnicki, Ł1, Witkowski, B. S.1, Lisowski, W.2, Krawczyk, M.2, Sobczak, J. W.2, Jabłoński, A.2, Godlewski, M.1,3, godlew@ifpan.edu.pl
Source: Semiconductor Science & Technology; Jul2012, Vol. 27 Issue 7, p1-14, 14p
Database: Applied Science & Technology Source
FullText Text:
  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 78095134
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=78095134
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        Value: 10.1088/0268-1242/27/7/074009
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              Text: Jul2012
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