An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.
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| Title: | An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing. |
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| Authors: | Mullany, B.1, Mainuddin, M.1, Williams, W.2, Keanini, R.1 |
| Source: | Journal of Applied Physics; Jun2013, Vol. 113 Issue 22, p224902, 13p, 2 Black and White Photographs, 3 Diagrams, 3 Charts, 8 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00218979 |
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| DOI: | 10.1063/1.4809555 |
