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An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.

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Bibliographic Details
Title: An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.
Authors: Mullany, B.1, Mainuddin, M.1, Williams, W.2, Keanini, R.1
Source: Journal of Applied Physics; Jun2013, Vol. 113 Issue 22, p224902, 13p, 2 Black and White Photographs, 3 Diagrams, 3 Charts, 8 Graphs
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 88194362
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.
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  Data: <searchLink fieldCode="JN" term="%22Journal+of+Applied+Physics%22">Journal of Applied Physics</searchLink>; Jun2013, Vol. 113 Issue 22, p224902, 13p, 2 Black and White Photographs, 3 Diagrams, 3 Charts, 8 Graphs
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=aci&AN=88194362
RecordInfo BibRecord:
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    Identifiers:
      – Type: doi
        Value: 10.1063/1.4809555
    Languages:
      – Code: eng
        Text: English
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        PageCount: 13
        StartPage: 224902
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      – TitleFull: An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.
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            NameFull: Mullany, B.
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            NameFull: Mainuddin, M.
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            NameFull: Williams, W.
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            NameFull: Keanini, R.
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            – D: 14
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              Text: Jun2013
              Type: published
              Y: 2013
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              Value: 00218979
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              Value: 113
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              Value: 22
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            – TitleFull: Journal of Applied Physics
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