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An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.

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Bibliographic Details
Title: An experimental and analytical investigation into the effects of process vibrations on material removal rates during polishing.
Authors: Mullany, B.1, Mainuddin, M.1, Williams, W.2, Keanini, R.1
Source: Journal of Applied Physics; Jun2013, Vol. 113 Issue 22, p224902, 13p, 2 Black and White Photographs, 3 Diagrams, 3 Charts, 8 Graphs
Database: Applied Science & Technology Source
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