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Erosion of amorphous carbon layers in the afterglow of oxygen microwave plasma.

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Title: Erosion of amorphous carbon layers in the afterglow of oxygen microwave plasma.
Authors: Drenik, A.1, aleksander.drenik@ijs.si, Salamon, L.1, Zaplotnik, R.1, Vesel, A.1, Mozetič, M.1
Source: Vacuum; Dec2013, Vol. 98, p45-48, 4p
Database: Applied Science & Technology Source
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  Availability: 0
Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 89433040
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1016/j.vacuum.2012.10.011
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      – Code: eng
        Text: English
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        PageCount: 4
        StartPage: 45
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      – TitleFull: Erosion of amorphous carbon layers in the afterglow of oxygen microwave plasma.
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            NameFull: Drenik, A.
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            NameFull: Zaplotnik, R.
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              Text: Dec2013
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              Y: 2013
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              Value: 98
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