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Erosion of amorphous carbon layers in the afterglow of oxygen microwave plasma.

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Bibliographic Details
Title: Erosion of amorphous carbon layers in the afterglow of oxygen microwave plasma.
Authors: Drenik, A.1, aleksander.drenik@ijs.si, Salamon, L.1, Zaplotnik, R.1, Vesel, A.1, Mozetič, M.1
Source: Vacuum; Dec2013, Vol. 98, p45-48, 4p
Database: Applied Science & Technology Source
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