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Mechanical scanning probe nanolithography: modeling and application.

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Bibliographic Details
Title: Mechanical scanning probe nanolithography: modeling and application.
Authors: Lytvyn, P. M.1, Lytvyn, O. S.1, Dyachyns'ka, O. M.1, Grytsenko, K. P.1, Schrader, S.2, Prokopenko, I. V.1
Source: Semiconductor Physics, Quantum Electronics & Optoelectronics; 2012, Vol. 15 Issue 4, p321-327, 7p
Database: Applied Science & Technology Source
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