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Laser bea m diffraction at the edge of a film and application to thin film metrology.

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Title: Laser bea m diffraction at the edge of a film and application to thin film metrology.
Authors: Do, P. A.1, Touaibia, M.2, Haché, A.1, hachea@umoncton.ca
Source: Applied Optics (1559-128X); 8/20/2013, Vol. 52 Issue 24, p5979-5984, 6p
Database: Applied Science & Technology Source
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Header DbId: aci
DbLabel: Applied Science & Technology Source
An: 90438111
AccessLevel: 2
PubType: Academic Journal
PubTypeId: academicJournal
PreciseRelevancyScore: 0
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  Data: Laser bea m diffraction at the edge of a film and application to thin film metrology.
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RecordInfo BibRecord:
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        Value: 10.1364/AO.52.005979
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      – Code: eng
        Text: English
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        PageCount: 6
        StartPage: 5979
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      – TitleFull: Laser bea m diffraction at the edge of a film and application to thin film metrology.
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            NameFull: Do, P. A.
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            NameFull: Touaibia, M.
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            NameFull: Haché, A.
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              Text: 8/20/2013
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              Y: 2013
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              Value: 52
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