High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing.
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| Title: | High aspect ratio submicrometer two-dimensional structures fabricated by one-photon absorption direct laser writing. |
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| Authors: | Do, Mai1, Li, Qinggele1, Nguyen, Thi, Benisty, Henri2, Ledoux-Rak, Isabelle1, Lai, Ngoc1, nlai@lpqm.ens-cachan.fr |
| Source: | Microsystem Technologies; Oct2014, Vol. 20 Issue 10/11, p2097-2102, 6p |
| Database: | Applied Science & Technology Source |
| ISSN: | 09467076 |
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| DOI: | 10.1007/s00542-014-2096-9 |
