Substrate-dependent thermal conductivity of aluminum nitride thin-films processed at low temperature.
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| Title: | Substrate-dependent thermal conductivity of aluminum nitride thin-films processed at low temperature. |
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| Authors: | Belkerk, B. E.1,2, boubakeur.belkerk@gmail.com, Bensalem, S.1, Soussou, A.1, Carette, M.1, Al Brithen, H.3, Djouadi, M. A.1, Scudeller, Y.1 |
| Source: | Applied Physics Letters; 12/1/2014, Vol. 105 Issue 22, p1-4, 4p, 1 Black and White Photograph, 1 Chart, 2 Graphs |
| Database: | Applied Science & Technology Source |
| ISSN: | 00036951 |
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| DOI: | 10.1063/1.4903220 |
