APA (7th ed.) Citation

Polignano, M. L., Codegoni, D., Grasso, S., Mica, I., Borionetti, G., & Nutsch, A. (2015). A comparative analysis of different measurement techniques to monitor metal and organic contamination in silicon device processing. Physica Status Solidi. A: Applications & Materials Science, 212(3), 495. https://doi.org/10.1002/pssa.201400082

Chicago Style (17th ed.) Citation

Polignano, M. L., D. Codegoni, S. Grasso, I. Mica, G. Borionetti, and A. Nutsch. "A Comparative Analysis of Different Measurement Techniques to Monitor Metal and Organic Contamination in Silicon Device Processing." Physica Status Solidi. A: Applications & Materials Science 212, no. 3 (2015): 495. https://doi.org/10.1002/pssa.201400082.

MLA (9th ed.) Citation

Polignano, M. L., et al. "A Comparative Analysis of Different Measurement Techniques to Monitor Metal and Organic Contamination in Silicon Device Processing." Physica Status Solidi. A: Applications & Materials Science, vol. 212, no. 3, 2015, p. 495, https://doi.org/10.1002/pssa.201400082.