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A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.

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Title: A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.
Authors: Rao, Prahalad K.1 (AUTHOR), Beyca, Omer F.2 (AUTHOR), Kong, Zhenyu (James)3 (AUTHOR), Bukkapatnam, Satish T. S.4 (AUTHOR) satish@tamu.edu, Case, Kenneth E.5 (AUTHOR), Komanduri, Ranga6 (AUTHOR)
Source: IIE Transactions. Oct2015, Vol. 47 Issue 10, p1088-1111. 24p. 3 Color Photographs, 2 Black and White Photographs, 4 Diagrams, 8 Charts, 5 Graphs.
Database: Academic Search Ultimate
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  Data: A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.
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  Data: <searchLink fieldCode="AR" term="%22Rao%2C+Prahalad+K%2E%22">Rao, Prahalad K.</searchLink><relatesTo>1</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Beyca%2C+Omer+F%2E%22">Beyca, Omer F.</searchLink><relatesTo>2</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Kong%2C+Zhenyu+%28James%29%22">Kong, Zhenyu (James)</searchLink><relatesTo>3</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Bukkapatnam%2C+Satish+T%2E+S%2E%22">Bukkapatnam, Satish T. S.</searchLink><relatesTo>4</relatesTo> (AUTHOR)<i> satish@tamu.edu</i><br /><searchLink fieldCode="AR" term="%22Case%2C+Kenneth+E%2E%22">Case, Kenneth E.</searchLink><relatesTo>5</relatesTo> (AUTHOR)<br /><searchLink fieldCode="AR" term="%22Komanduri%2C+Ranga%22">Komanduri, Ranga</searchLink><relatesTo>6</relatesTo> (AUTHOR)
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  Data: <searchLink fieldCode="JN" term="%22IIE+Transactions%22">IIE Transactions</searchLink>. Oct2015, Vol. 47 Issue 10, p1088-1111. 24p. 3 Color Photographs, 2 Black and White Photographs, 4 Diagrams, 8 Charts, 5 Graphs.
PLink https://search.ebscohost.com/login.aspx?direct=true&site=eds-live&db=asn&AN=108612082
RecordInfo BibRecord:
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      – Type: doi
        Value: 10.1080/0740817X.2014.1001927
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      – Code: eng
        Text: English
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        PageCount: 24
        StartPage: 1088
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      – TitleFull: A graph-theoretic approach for quantification of surface morphology variation and its application to chemical mechanical planarization process.
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            NameFull: Rao, Prahalad K.
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            NameFull: Beyca, Omer F.
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            NameFull: Kong, Zhenyu (James)
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            NameFull: Bukkapatnam, Satish T. S.
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            NameFull: Case, Kenneth E.
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              M: 10
              Text: Oct2015
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              Y: 2015
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