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Effects of temperature on PO and resistivity of ScAlN film.

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Title: Effects of temperature on PO and resistivity of ScAlN film.
Authors: Yang, YX.1,2 (AUTHOR) 416556737@qq.com, Li, XM.1,2 (AUTHOR), Zhou, D.1,2 (AUTHOR), Yang, CT.1,2 (AUTHOR), Feng, F.1,2 (AUTHOR), Yang, JS.1,2 (AUTHOR), Hu, QJ.1,2 (AUTHOR)
Source: Surface Engineering. Oct2015, Vol. 31 Issue 10, p775-778. 4p.
Database: Academic Search Ultimate
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ISSN:02670844
DOI:10.1179/1743294415Y.0000000040