Effects of temperature on PO and resistivity of ScAlN film.
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| Title: | Effects of temperature on PO and resistivity of ScAlN film. |
|---|---|
| Authors: | Yang, YX.1,2 (AUTHOR) 416556737@qq.com, Li, XM.1,2 (AUTHOR), Zhou, D.1,2 (AUTHOR), Yang, CT.1,2 (AUTHOR), Feng, F.1,2 (AUTHOR), Yang, JS.1,2 (AUTHOR), Hu, QJ.1,2 (AUTHOR) |
| Source: | Surface Engineering. Oct2015, Vol. 31 Issue 10, p775-778. 4p. |
| Database: | Academic Search Ultimate |
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| Header | DbId: asn DbLabel: Academic Search Ultimate An: 110204314 AccessLevel: 2 PubType: Academic Journal PubTypeId: academicJournal PreciseRelevancyScore: 0 |
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| RecordInfo | BibRecord: BibEntity: Identifiers: – Type: doi Value: 10.1179/1743294415Y.0000000040 Languages: – Code: eng Text: English PhysicalDescription: Pagination: PageCount: 4 StartPage: 775 Titles: – TitleFull: Effects of temperature on PO and resistivity of ScAlN film. Type: main BibRelationships: HasContributorRelationships: – PersonEntity: Name: NameFull: Yang, YX. – PersonEntity: Name: NameFull: Li, XM. – PersonEntity: Name: NameFull: Zhou, D. – PersonEntity: Name: NameFull: Yang, CT. – PersonEntity: Name: NameFull: Feng, F. – PersonEntity: Name: NameFull: Yang, JS. – PersonEntity: Name: NameFull: Hu, QJ. IsPartOfRelationships: – BibEntity: Dates: – D: 01 M: 10 Text: Oct2015 Type: published Y: 2015 Identifiers: – Type: issn-print Value: 02670844 Numbering: – Type: volume Value: 31 – Type: issue Value: 10 Titles: – TitleFull: Surface Engineering Type: main |
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