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Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering

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Title: Characteristics of Carrier Transport and Crystallographic Orientation Distribution of Transparent Conductive Al-Doped ZnO Polycrystalline Films Deposited by Radio-Frequency, Direct-Current, and Radio-Frequency-Superimposed Direct-Current Magnetron Sputtering
Authors: Junichi Nomoto1 nomoto.junichi@kochi-tech.ac.jp, Katsuhiko Inaba2 inaba@rigaku.co.jp, Shintaro Kobayashi2 s-kobaya@rigaku.co.jp, Takeshi Watanabe3 t5511001@spring8.or.jp, Hisao Makino1 makino.hisao@kochi-tech.ac.jp, Tetsuya Yamamoto1 yamamoto.tetsuya@kochi-tech.ac.jp
Source: Materials (1996-1944). Aug2017, Vol. 10 Issue 8, p916. 18p. 2 Diagrams, 2 Charts, 8 Graphs.
Database: Academic Search Ultimate
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ISSN:19961944
DOI:10.3390/ma10080916